1.設備規(guī)格-1
◆ Material Thickness
- PET : 25 ~ 200?
◆ Roll Dimension
ITEM | Min | Max |
Width (膜寬幅) | 650mm | 1700mm |
Diameter | 900mm |
◆ Winding
ITEM | Description |
Web Speed | 0.5 .. 10m/min |
Unwind | 70 … 300N |
Rewind | 70 … 300N |
1.設備規(guī)格-2
◆ Vacuum Condition (真空度規(guī)格)
No | Description |
Base Pressure (基礎真空度) | ≤ 7.0 × 10-6 mbar ?? |
Process Pressure (工程真空度) | 1 … 7 × 10-3 mbar |
Venting Time (排氣時間) | Approx. 20minutes |
◆ Machine Control (設備控制)
1.網絡設備由PLC I/O系統(tǒng)控制，可以實時檢測( Profibus DP)
- Type Q-PLC (made by MITSUBISHI)
2.卷繞驅動由AC servo driver system精密控制 (Tension Control)
3. Data transfer : Profibus DP interface with fiber optics (TMP, MF)
4. System Automation (系統(tǒng)自動化)
- Pumping Function (Ramp up/down)
- Deposition parameter storage(儲存鍍膜條件)
- Automatic process stop (錯誤發(fā)生時)
- 各產品自動升級(Recipe)
2. 設備裝置-1
◆ Dimensions & Weight
ITEM | Description |
System Lay Out | Approx. 18000mm×22000mm |
Width (Chamber) | Approx. 8100mm |
Height (Chamber) | Approx. 3500mm |
Weight (Chamber) | Approx. 40,000kg |
?2Drum腔體為基準，根據設備規(guī)格裝置也會變更。
◆ Electrical services
ITEM | Description |
Voltage | 380v ±10%, 50Hz, 3 Phase |
Average consumption | Approx. 500kw |
2. 設備裝置-2
◆ Cooling Water Spec (冷卻水裝置)
ITEM | Description |
Inlet pressure (輸入壓力) | 4……6 bar |
Outlet pressure (輸出壓力) | 0.1…..1 bar, open drain |
Consumption | Max. 70m3/h Average 50 m3/h |
Temperature (Inlet) 輸入溫度 | Min : 17℃, Max : 23℃ |
Carbonate hardness 碳酸鹽硬度 | ＜ 6 … 8′dh |
pH valus | 8.5 … 10 |
CO2 content | Max 15 mg/l |
Cl content | Max 20 mg/l |
2. 設備制造-3
◆ Compressed air (空氣)
ITEM | Description |
Pressure (壓力) | 6 … 7 bar |
Average consumption | Approx. 1 m3/h |
Oil content | Max. 6 mg/m3 |
◆. 腔體構造
◆. Cathode & Cooling Drum 構造
◆ PEM system 持有控制技術
